Metasurface-based MEMS THz-to-IR focal plane array

dc.contributor.authorPimental, Leroy
dc.contributor.authorAlves, Fabio
dc.contributor.authorKarunasiri, Gamani
dc.contributor.corporateNaval Postgraduate School (U.S.)en_US
dc.dateMarch 6, 2018
dc.descriptionAPS March Meeting 2018, Volume 63, Number 1, Monday–Friday, March 5–9, 2018; Los Angeles, California
dc.descriptionThe item of record as published may be found at
dc.description.abstractTerahertz (THz) technology has gained momentum in recent years owing to special properties of THz waves of being non-ionizing and at the same time being able to penetrate through nonmetallic and non-polar materials. Nearly perfect THz absorption, optimized to particular THz quantum cascade laser (QCL) illumination sources, was achieved using metal-dielectric metasurfaces. The metasurfaces are comprised of ultra-thin films of silicon oxide and aluminum, deposited on silicon substrates and were fabricated using standard MEMS processes. The metasurface absorbers were structurally integrated onto an array of thermally insulated free-standing MEMS membranes that work as heat accumulators. The temperature of array is probed directly by a commercial thermal camera, translating the THz scene to infrared. The main characteristics such as spectral response, thermal time constant and sensitivity are controlled by the geometry and tuned by design according to the application demands. The results indicate a great potential of using these THz sensors in real-time imaging applications.en_US
dc.description.sponsorshipSupported by DoD-SPen_US
dc.format.extent1 p.en_US
dc.identifier.citationPimental, Leroy, Fabio Alves, and Gamani Karunasiri. "Metasurface-based MEMS THz-to-IR focal plane array." Bulletin of the American Physical Society 63 (2018).en_US
dc.publisherAmerican Physical Societyen_US
dc.rightsThis publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.en_US
dc.titleMetasurface-based MEMS THz-to-IR focal plane arrayen_US
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