Fabrication of Bi-material MEMS detector arrays for THz imaging
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Authors
Grbovic, Dragoslav
Karunasiri, Gamani
Subjects
substrate-free
MEMS THz
MEMS IR
THz imaging
SiO2 MEMS
MEMS THz
MEMS IR
THz imaging
SiO2 MEMS
Advisors
Date of Issue
2009-04-30
Date
Publisher
SPIE
Language
Abstract
Recently, there has been a significant interest in Terahertz (THz) technology, primarily for its potential applications in detection of concealed objects as well as in medical imaging for non-invasive diagnostics. This region of the spectrum has not been fully utilized due to lack of compact and efficient THz sources and detectors. However, there are several reports recently on real-time THz imaging using uncooled microbolometer camera and quantum cascade laser (QCL) operating as a THz illuminator. The cameras used in these studies are optimized for infrared wavelengths and do not provide optimal sensitivity in the THz spectral range. The fabrication of microbolometer focal plane arrays (FPAs) is relatively complex due to the required monolithic integration of readout electronics with the MEMS pixels. The recent developments in bi-material based infrared FPAs, utilizing optical readout, substantially simplifies the FPA fabrication process by decoupling readout and sensing. In this paper, design and fabrication of a bi-material based FPAs, optimized for the THz wavelengths, as well as design and integration of the readout optical system for real-time imaging will be described.
Type
Article
Description
The article of record as published may be found at http://dx.doi.org/10.1117/12.818317
Series/Report No
Department
Physics
Organization
Naval Postgraduate School (U.S.)
Identifiers
NPS Report Number
Sponsors
Air Force Office of Scientific Research (AFOSR)
Funder
Format
8 p.
Citation
Grbovic, Dragoslav, and Gamani Karunasiri. "Fabrication of bi-material MEMS detector arrays for THz imaging." Terahertz Physics, Devices, and Systems III: Advanced Applications in Industry and Defense. Vol. 7311. International Society for Optics and Photonics, 2009.
Distribution Statement
Rights
This publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.