Toward a micro-scale acoustic direction-finding sensor with integrated electronic readout

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dc.contributor.advisorKurunasiri, Gamani
dc.contributor.authorDowney, Richard H.
dc.contributor.departmentPhysics
dc.dateJun-13
dc.date.accessioned2013-08-01T16:51:34Z
dc.date.available2013-08-01T16:51:34Z
dc.date.issued2013-06
dc.description.abstractSeveral advances are made toward a microelectromechanical (MEMS) acoustic direction-finding sensor based on the Ormia ochracea fly’s ear. First, linear elastic stiffness models are presented and then validated by using a nanoindenter to measure the sensor’s stiffness directly. The measured stiffness is highly linear, and the resonant frequencies are correctly predicted by the models presented. Additional nanoindenter results suggest that the sensor can be exposed to at least 162 decibel sound pressure level with no loss of function. Next, an improved capacitive readout system using branched comb fingers is presented. This design is shown to double electrical sensitivity to motion. Finally, it is shown that residual stress-induced curvature in the sensors greatly reduces their sensitivity by effectively shrinking the readout capacitors. A simple model of this curvature is presented and then verified by measurements. This model offers an extremely straightforward means of predicting curvature in similarly fabricated structures. It is also shown that perforations in the sensor’s structure have no effect on curvature. The results presented here provide several essential tools for the continued development of the MEMS acoustic direction-finding sensor.en_US
dc.description.distributionstatementApproved for public release; distribution is unlimited.
dc.description.serviceCommander, United States Navyen_US
dc.description.urihttp://archive.org/details/towardmicroscale1094534658
dc.identifier.urihttps://hdl.handle.net/10945/34658
dc.publisherMonterey, California: Naval Postgraduate Schoolen_US
dc.rightsThis publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.en_US
dc.subject.authorMEMSen_US
dc.subject.authorMicroelectromechanicalen_US
dc.subject.authorSensoren_US
dc.subject.authorAcousticen_US
dc.subject.authorSounden_US
dc.subject.authorDirectionalen_US
dc.subject.authorDirection-findingen_US
dc.subject.authorOrmia ochracea.en_US
dc.titleToward a micro-scale acoustic direction-finding sensor with integrated electronic readouten_US
dc.typeThesis
dspace.entity.typePublication
etd.thesisdegree.disciplineApplied Physicsen_US
etd.thesisdegree.levelDoctoralen_US
etd.thesisdegree.nameDoctor of Philosophy In Applied Physicsen_US
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