Bio-Inspired MEMS Direction Finding Underwater Acoustic Sensor Operating in Neutral-Buoyant Configuration
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Authors
McCarty, Leland
Park, Jaehyun
Alves, Fabio
Karunasiri, Gamani
Subjects
Advisors
Date of Issue
2020-03
Date
Publisher
Language
Abstract
MEMS acoustic sensors were developed based on the mechanically coupled auditory structure of the Ormia Ochracea fly in order to enhance underwater
directional sound-sensing technologies. MEMS directional acoustic sensors consists of two wings connected by a bridge in the middle. The entire
mechanical structure is connected to a substrate using two torsional legs. The mechanical vibrations under sound excitation is transduced to an electrical
signal using interdigitated comb finger capacitors attached to the edges of the wings. This presentation covers the design, fabrication, and characterization of
Ormia-based MEMS directional acoustic sensor operated underwater as an inertial sensor. The sensors were designed using FE modeling tools and
fabricated using commercially available MEMSCap SOIMUMPS processes. Characterization was performed in air and underwater, showing the predicted
frequency and directional responses. For underwater operation, the sensors were housed in a near-neutral-buoyant, hermetically sealed enclosure. Results
indicate that the MEMS acoustic sensor's microphone characteristics are preserved when operated as accelerometers, and they have a great potential to be
used for underwater applications in a neutral-buoyant configuration.
Type
Abstract
Description
For American Physical Society March Meeting 2020, Session on Detectors, Sensors, and Transducers
APS March Meeting 2020
APS March Meeting 2020
Series/Report No
Department
Organization
Naval Postgraduate School (U.S.)
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NPS Report Number
Sponsors
GIMS
Office of Naval Research
GIMS
Office of Naval Research
GIMS
Funder
Format
1 p.
Citation
McCarty, Leland, et al. "Bio-Inspired MEMS Direction Finding Underwater Acoustic Sensor Operating in Neutral-Buoyant Configuration." Bulletin of the American Physical Society 65 (2020).
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This publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.