MEMS Fabrication: Introduction to Polysilicon Surface Micromachining Process
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Authors
Subjects
MEMS fabrication
microfabrication
polysilicon
deposition
micromachining
micro-machining
CVD
chemical vapor deposition
photoresist
soft bake
hard bake
photolithography
pattern oxide
reactive ion etching
RIE
stripping
sacrificial
microfabrication
polysilicon
deposition
micromachining
micro-machining
CVD
chemical vapor deposition
photoresist
soft bake
hard bake
photolithography
pattern oxide
reactive ion etching
RIE
stripping
sacrificial
Advisors
Date of Issue
2004-06-10
Date
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Abstract
No file available.
This tutorial presents the sequential arrangement of surface micromachining processes through animations and video clips.
This tutorial presents the sequential arrangement of surface micromachining processes through animations and video clips.
Type
Interactive Media Element (IME)
Description
tut
present
anim
Tutorial
Presentation
Animation
Interactive Media Element
No file available.
present
anim
Tutorial
Presentation
Animation
Interactive Media Element
No file available.
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Rights
This publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.