Quantitative Energy-Filtered Convergent Beam Electron Diffraction-Matching Theory to Experiment
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Authors
Saunders, M.
Midgley, P.A.
Walsh, T.D.
Menon, E.S.K.
Fox, A.G.
Vincent, R.
Subjects
Quantitative Convergent Beam Electron Diffraction (CBED)
structure factor
energy-filter
point spread function
noise model
structure factor
energy-filter
point spread function
noise model
Advisors
Date of Issue
1997
Date
Publisher
Language
Abstract
Quantitative Convergent Beam Electron Diffraction
(CBED) is now established as a means of accurate loworder
structure factor determination. Using energy-filtered
zone-axis CBED patterns it has been demonstrated that the
111 structure factor at the <110> zone-axis in Si can be
measured to better than 0.1%. In order to achieve this
accuracy, it is essential to have a full understanding of the
zone-axis pattern matching technique (ZAPMATCH) and
the microscope system on which the data is acquired. Before
any patterns can be analyzed, the effects of the detector
system [in our case a Gatan Imaging Filter (GIF)] on the
recorded intensities must be understood. Consideration
must also be given to the number of structure factors that
can be refined from any given data set. Our recent
implementation of ZAPMATCH on a Topcon 002B with GIF
provides an illustrative example of the former. Measurements
of the low-order structure factors of nickel serve to demonstrate
the latter.
Type
Article
Description
Series/Report No
Department
Organization
Center for Materials Science and Engineering
Identifiers
NPS Report Number
Sponsors
Funding
Format
Citation
Scanning Microscopy Vol. 11, 1997 (Pages 23-29)
Distribution Statement
Rights
This publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.