Miniature Micro-Electromechanical System (MEMS) Base Directional Sound Sensor
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Authors
Karunasiri, Gamani
Sinibaldi, Jose
Advisors
Second Readers
Subjects
Date of Issue
2013-06-18
Date
Publisher
United States Patent and Trademark Office (USPTO)
Language
Abstract
A micro-electromechanical (MEMS) based directional sound sensor includes a two sensor wings attached to a surrounding support structure by two legs. The support structure is hollow beneath the sensor wings allowing the sensor wings to vibrate in response to sound excitation. In one embodiment, interdigitated comb finger capacitors attached on the sensor wing edges and the support structure enable an electrostatic (capacitive) readout related to the vibrations of the sensor which allows determination of the sound direction.
Type
Patent
Description
Series/Report No
Department
Organization
Identifiers
US 8,467,548 B2
NPS Report Number
Sponsors
Funding
Format
14 p.
Citation
Distribution Statement
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This publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.