Characterization of a micromachined vertically deformable varying-pitch grating for a spectrometer
Authors
Kim, B.
Phamduy, P.
Sinibaldi, J.
Karunasiri, G.
Advisors
Second Readers
Subjects
Date of Issue
2011-12-08
Date
December 8, 2011
Publisher
IOP Publishing
Language
Abstract
A new type of micromachined vertically deformable varying-pitch grating is designed and fabricated. Its characterization and its feasibility as a spectrometer are presented. The deformable grating shows a 0.7 µm working range and 3.6 kHz bandwidth. Its characterization and its feasibility as a spectrometer are presented. The varying-pitch grating has the ability to detect an individual wavelength with a single detector by physical scanning. Its deformable capability can increase intensity and resolution at a specific wavelength. Those two capabilities are experimentally demonstrated.
Type
Article
Description
The article of record as published may be found at http://dx.doi.org/10.1088/0960-1317/22/1/015001
Series/Report No
Department
Physics
Organization
Naval Postgraduate School (U.S.)
Identifiers
NPS Report Number
Sponsors
Funding
Format
12 p.
Citation
Kim, B., et al. "Characterization of a micromachined vertically deformable varying-pitch grating for a spectrometer." Journal of Micromechanics and Microengineering 22.1 (2011): 015001.
Distribution Statement
Rights
This publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.