A transition radiation source with a grazing angle optic for step and scan lithography
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Authors
Piestrup, M.A.
Powell, M.W.
Mrowka, S.
Cremer, J.T.
Lombardo, L.W.
Chase, M.B.
Snyder, D.
Rietdyk, H.
Maruyama, X.K.
Subjects
X-ray lithography
Integrated circuits
Transition radiation
X-ray optics
Integrated circuits
Transition radiation
X-ray optics
Advisors
Date of Issue
1998
Date
Publisher
Language
Abstract
Using a grazing angle mirror, the collection and collimation of transition radiation into a slit pattern that can be
scanned across an image plane for X-ray dose uniformity is demonstrated. An Au-coated grazing-angle optic was used
to focus transition radiation into a rectangular or slit pattern (7 mm ยด 16 mm) in the image plane at 631 mm from the
optic and 881 mm from the transition radiator. Intensity variation across the longitudinal direction ( 10 mm) of the slit was less than greater or equal to 5%. The grazing angle optic with a transition radiator can be used for step and scan lithography for
obtaining circuit resolution patterns below 0.1 um.
Type
Article
Description
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Department
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NPS Report Number
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Format
Citation
Nuclear Instruments and Methods in Physics Research B, Volume 145, pp. 230-235, 1998.
Distribution Statement
Rights
This publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.