The angular distribution of single crystal molybdenum sputtered by 1-10 keV cesium ions.

Abstract

Yield and angular distribution measurements of sputtered molybdenum by a 1-10 kev cesium ion beam parallel to the <100> crystallographic direction have successfully been made employing a radioactive tracer technique previously developed for similar work done with copper. The yield was found to be dependent not only upon the incident ion energy, but also upon the target temperature. The temperature dependence was attributed to annealing out of defects created near the surface of the crystal during ion bombardment. Nonlinear regression analysis of the data indicates that most of the emitted particles were in a cosine distribution. The data showed that focusing chains are of secondary consideration in the energy and temperature regions investigated.