The angular distribution of single crystal molybdenum sputtered by 1-10 keV cesium ions.
Abstract
Yield and angular distribution measurements of sputtered
molybdenum by a 1-10 kev cesium ion beam parallel to the <100>
crystallographic direction have successfully been made employing
a radioactive tracer technique previously developed for
similar work done with copper. The yield was found to be
dependent not only upon the incident ion energy, but also upon
the target temperature. The temperature dependence was
attributed to annealing out of defects created near the surface
of the crystal during ion bombardment. Nonlinear regression
analysis of the data indicates that most of the emitted
particles were in a cosine distribution. The data showed that
focusing chains are of secondary consideration in the energy
and temperature regions investigated.
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