Naval Postgraduate School
Theses and Dissertations
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Design of two-axis capacitive accelerometer using MEMS
(Monterey California. Naval Postgraduate School, 2004-12)
MEMS technology is rapidly taking an important role in today's and future military systems. MEMS are able to lower the device size from millimeter to micrometer and maintain and sometimes surpass the performance of ...
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Karunasiri, Gamani (1)
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Sinibaldi, Jose (1)
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2004 (1)