Theses and Dissertations
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Infrared characterization of SiN films on Si for high speed electronics applications
(Monterey California. Naval Postgraduate School, 2004-12)
In this thesis, SiN films grown on Si substrates were characterized using Fourier Transform Infrared (FTIR) spectroscopy. The stress in SiN films can be used to enhance of mobility of electrons and holes which increases ...