Computer simulation of the angular dispersion of sputtered copper isotopes and a possible liquid splash effect
Kelly, Patrick Wayne, Sr,
Harrison, Don E., Jr.
Cooper, John N.
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The NPS computer simulation model was modified to study the angular dispersion and ring of sputtering sites formation of sputtered copper isotopes. the sputtering ratio as a function of the ion mass and the microcrystallite size needed to contain low-energy events were also investigated. A shift in the ejection angles of sputtered Cu (63) isotopes toward the surface normal is observed. When the "primary knock-on atom" was a light isotope, all of the sputtered atoms were ejected more nearly normal to the surface. The predominance of sputtered atoms in the <100> and <101> directions from the impact atom indicated an ease of momentum transfer in these directions. Results obtained from studies based upon a grid of impact points compares very favorably with the results obtained when randomly selected impact points were used. The rings of sputtered atoms present a "liquid splash" effect.
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