Computer simulation studies of sputtering and multimer formation from clean and oxygen reacted surfaces of titanium, vanadium and niobium.
Mathis, Michael G.
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The NPS computer simulation model was used to investigate the sputtering by 1.0 keV argon bombardment of clean and oxygen reacted monocrystalline titanium, vanadium and niobium. Variations in yield, energy and angular distributions and in particular, multimer formation, were studied as a function of oxygen density and location. Simulation results show a significant decline in substrate yield as the oxygen coverage is increased, regardless of location. Further, there is a marked preference for multimer formation by lattice fragmentation, rather than by recombination, for all three metals. The percentages of multimers formed by fragmentation were found to increase with increasing oxygen density for all three metals. Previous results on face- centered cubic crystals concerning the yield per layer and the effects of channeling were confirmed for body-centered cubic and hexagonal closed-packed crystals. For comparison, simulation runs were repeated at ion energies of 0.5 and 2.0 keV for a titanium with oxygen atoms located in three-fold sites with a C(2x2) density.
Distinguished Alumni Award Program author. RADM Michael Mathis, USN (Ret.) (Presented 25 May 12)Harrison, D.E.
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