Show simple item record

dc.contributor.advisorHarrison, Don E. Jr.
dc.contributor.authorMattson, Philip Jay
dc.dateDecember 1986
dc.date.accessioned2012-11-27T00:18:16Z
dc.date.available2012-11-27T00:18:16Z
dc.date.issued1986-12
dc.identifier.urihttp://hdl.handle.net/10945/22117
dc.descriptionApproved for public release; distribution is unlimited
dc.description.abstractThe Naval Postgraduate School simulation model, QDYN86, was used to examine sputtering of nitrogen from the (100) faces of single crystals of molybdenum and tungsten. The nitrogen placement was varied, and analyses were conducted on the sputtering cross sections of the nitrogen. The cases where the a da torn was directly hit by the incident ion, or if it was sputtered due to the collision cascade process, were analyzed separately. The simulations were conducted to compare the results with Winters' recent work, and to build upon the efforts of earlier studies completed at the Naval Postgraduate School. It was found that placement of nitrogen at 0.245 A from the surface of molybdenum resulted in cross sections similar to those found by Winters. The effect of the mass of the substrate was verified, in that a substrate of greater mass results in a higher sputtering cross section. This agreed with Winters' findings, and conflicted with earlier conclusions of past theses. The adatoms apparently reduce the momentum available to create collision cascades, reducing the sputter yield ratio of the substrate when the ions directly hit the adatoms.
dc.description.urihttp://archive.org/details/sputteringofchem00matt
dc.format.extent85 p.en_US
dc.language.isoen_US
dc.rightsThis publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.
dc.subject.lcshPhysicsen_US
dc.titleSputtering of chemisorbed nitrogen from the (100)--planes of tungsten and molybdenum: a comparison of computer simulation and experimental results.en_US
dc.typeThesisen_US
dc.contributor.secondreaderWoehler, Karlheinz E.
dc.contributor.corporateNaval Postgraduate School (U.S.)
dc.contributor.departmentPhysics
dc.subject.authorsputtering
dc.subject.authorcomputer simulation
dc.subject.authorchemically reacted surfaces
dc.description.serviceCaptain, United States Army
etd.thesisdegree.nameM.S. in Physicsen_US
etd.thesisdegree.levelMastersen_US
etd.thesisdegree.disciplinePhysicsen_US
etd.thesisdegree.grantorNaval Postgraduate Schoolen_US


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record