Study of computer simulation of sputtering from nitrogen reacted molybdenum and tungsten targets.
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Authors
Webb, Stephen M.
Subjects
NA
Advisors
Date of Issue
1986
Date
Publisher
Language
en_US
Abstract
Type
Thesis
Description
Series/Report No
Department
NA
Organization
NA
Identifiers
NPS Report Number
Sponsors
Funder
Format
85 p.