Metallization of CVD diamond using metal oxide intermediate layers for electronics packaging
Kroll, Darwin E
MetadataShow full item record
The high thermal conductivity of chemically vapor deposited CVD diamond (up to 2000 W/m/K) and its low dielectric constant (approx. 5.6) makes it highly desirable for use as an electronics packaging substrate material. To make CVD diamond amenable to thick film metallization via standard industrial processes, a thin gamma-alumina layer (approx. 1500A) was grown on diamond by reactive evaporation of Al in oxygen over a very thin Cr intermediate-layer (approx. 700A). Commercially available silver and gold thick films were applied to CVD diamond both with and without the metal-oxide inter-layer. The interfaces were characterized by scanning electron microscopy, energy dispersive x-ray spectroscopy, Auger electron spectroscopy and transmission electron microscopy. The intermediate oxide layer was found to result in well-adherent, chemically bonded interfaces between the metallization and the CVD diamond substrates for both Ag and Au pastes. Without the oxide layer, the Ag paste was found to have very poor adhesion to the substrate. The Au paste, developed for non-oxide substrates, was found to be nominally adherent to the CVDD substrate, although quantitative adhesion comparisons between the metallization with and without the oxide inter-layer was not obtained. Microstructural and chemical characterization studies of the interface suggest that the alumina layer enhances adhesion by producing chemically-reacted/solid-solution species across all interfaces and is therefore a very versatile approach for thick film metallization of CVDD
Showing items related by title, author, creator and subject.
Surface Modification of Synthetic Diamond for Producing Adherent Thick and Thin Film Etallizations for Electronic Packaging Dutta, Indranath; Menon, Sarath K. (The United States of America as represented by the Secretary of the Navy, Washington, DC (US), 1998-12-29);An article and a method of making surface modified synthetic diamond substrates at temperatures below 5000 C. for electronic packaging applications are described. The article consists of a synthetic diamond substrate, the ...
Chang, Wen-Huan (Monterey, California. Naval Postgraduate School, 1994-09);A flow visualization study of the vortical flow over a baseline double-delta wing model and a diamond-fillet double-delta wing model both with sharp leading edges was conducted in the Naval Postgraduate School water tunnel ...
Schulz, David Vargas (Monterey, California. Naval Postgraduate School, 2007-12);This thesis will focus on the Mexican Armed Force's ability to deal with existing and future unconventional threats and insurgencies. The modern Mexican Armed Forces are the result of an enduring evolutionary process, ...