A transition radiation source with a grazing angle optic for step and scan lithography
dc.contributor.author | Piestrup, M.A. | |
dc.contributor.author | Powell, M.W. | |
dc.contributor.author | Mrowka, S. | |
dc.contributor.author | Cremer, J.T. | |
dc.contributor.author | Lombardo, L.W. | |
dc.contributor.author | Chase, M.B. | |
dc.contributor.author | Snyder, D. | |
dc.contributor.author | Rietdyk, H. | |
dc.contributor.author | Maruyama, X.K. | |
dc.date.accessioned | 2014-08-28T23:05:15Z | |
dc.date.available | 2014-08-28T23:05:15Z | |
dc.date.issued | 1998 | |
dc.identifier.citation | Nuclear Instruments and Methods in Physics Research B, Volume 145, pp. 230-235, 1998. | |
dc.identifier.uri | http://hdl.handle.net/10945/43153 | |
dc.description.abstract | Using a grazing angle mirror, the collection and collimation of transition radiation into a slit pattern that can be scanned across an image plane for X-ray dose uniformity is demonstrated. An Au-coated grazing-angle optic was used to focus transition radiation into a rectangular or slit pattern (7 mm ´ 16 mm) in the image plane at 631 mm from the optic and 881 mm from the transition radiator. Intensity variation across the longitudinal direction ( 10 mm) of the slit was less than greater or equal to 5%. The grazing angle optic with a transition radiator can be used for step and scan lithography for obtaining circuit resolution patterns below 0.1 um. | en_US |
dc.rights | This publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States. | en_US |
dc.title | A transition radiation source with a grazing angle optic for step and scan lithography | en_US |
dc.type | Article | en_US |
dc.subject.author | X-ray lithography | en_US |
dc.subject.author | Integrated circuits | en_US |
dc.subject.author | Transition radiation | en_US |
dc.subject.author | X-ray optics | en_US |