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dc.contributor.authorPiestrup, M.A.
dc.contributor.authorPowell, M.W.
dc.contributor.authorMrowka, S.
dc.contributor.authorCremer, J.T.
dc.contributor.authorLombardo, L.W.
dc.contributor.authorChase, M.B.
dc.contributor.authorSnyder, D.
dc.contributor.authorRietdyk, H.
dc.contributor.authorMaruyama, X.K.
dc.date.accessioned2014-08-28T23:05:15Z
dc.date.available2014-08-28T23:05:15Z
dc.date.issued1998
dc.identifier.citationNuclear Instruments and Methods in Physics Research B, Volume 145, pp. 230-235, 1998.
dc.identifier.urihttp://hdl.handle.net/10945/43153
dc.description.abstractUsing a grazing angle mirror, the collection and collimation of transition radiation into a slit pattern that can be scanned across an image plane for X-ray dose uniformity is demonstrated. An Au-coated grazing-angle optic was used to focus transition radiation into a rectangular or slit pattern (7 mm ´ 16 mm) in the image plane at 631 mm from the optic and 881 mm from the transition radiator. Intensity variation across the longitudinal direction ( 10 mm) of the slit was less than greater or equal to 5%. The grazing angle optic with a transition radiator can be used for step and scan lithography for obtaining circuit resolution patterns below 0.1 um.en_US
dc.rightsThis publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. As such, it is in the public domain, and under the provisions of Title 17, United States Code, Section 105, may not be copyrighted.en_US
dc.titleA transition radiation source with a grazing angle optic for step and scan lithographyen_US
dc.typeArticleen_US
dc.subject.authorX-ray lithographyen_US
dc.subject.authorIntegrated circuitsen_US
dc.subject.authorTransition radiationen_US
dc.subject.authorX-ray opticsen_US


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