A transition radiation source with a grazing angle optic for step and scan lithography

Abstract

Using a grazing angle mirror, the collection and collimation of transition radiation into a slit pattern that can be scanned across an image plane for X-ray dose uniformity is demonstrated. An Au-coated grazing-angle optic was used to focus transition radiation into a rectangular or slit pattern (7 mm ´ 16 mm) in the image plane at 631 mm from the optic and 881 mm from the transition radiator. Intensity variation across the longitudinal direction ( 10 mm) of the slit was less than greater or equal to 5%. The grazing angle optic with a transition radiator can be used for step and scan lithography for obtaining circuit resolution patterns below 0.1 um.