Show simple item record

dc.contributor.authorPiestrup, M.A.
dc.contributor.authorPowell, M.W.
dc.contributor.authorMrowka, S.
dc.contributor.authorCremer, J.T.
dc.contributor.authorLombardo, L.W.
dc.contributor.authorChase, M.B.
dc.contributor.authorSnyder, D.
dc.contributor.authorRietdyk, H.
dc.contributor.authorMaruyama, X.K.
dc.date.accessioned2014-08-28T23:05:15Z
dc.date.available2014-08-28T23:05:15Z
dc.date.issued1998
dc.identifier.citationNuclear Instruments and Methods in Physics Research B, Volume 145, pp. 230-235, 1998.
dc.identifier.urihttp://hdl.handle.net/10945/43153
dc.description.abstractUsing a grazing angle mirror, the collection and collimation of transition radiation into a slit pattern that can be scanned across an image plane for X-ray dose uniformity is demonstrated. An Au-coated grazing-angle optic was used to focus transition radiation into a rectangular or slit pattern (7 mm ´ 16 mm) in the image plane at 631 mm from the optic and 881 mm from the transition radiator. Intensity variation across the longitudinal direction ( 10 mm) of the slit was less than greater or equal to 5%. The grazing angle optic with a transition radiator can be used for step and scan lithography for obtaining circuit resolution patterns below 0.1 um.en_US
dc.rightsThis publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.en_US
dc.titleA transition radiation source with a grazing angle optic for step and scan lithographyen_US
dc.typeArticleen_US
dc.subject.authorX-ray lithographyen_US
dc.subject.authorIntegrated circuitsen_US
dc.subject.authorTransition radiationen_US
dc.subject.authorX-ray opticsen_US


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record