Infrared imaging using arrays of SiO2 micromechanical detectors

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Author
Datskos, P.G.
Lavrik, N.V.
Hunter, S.R.
Rajic, S.
Grbovic, D.
Date
2012-10Metadata
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In this Letter, we describe the fabrication of an array of bimaterial detectors for infrared (IR) imaging that utilize SiO2
as a structural material. All the substrate material underneath the active area of each detector element was removed.
Each detector element incorporates an optical resonant cavity layer in the IR-absorbing region of the sensing
element. The simplified microfabrication process requires only four photolithographic steps with no wet etching
or sacrificial layers...
Description
Optics Letters, Volume 37, No. 19, pp. 3966-3968 (October 2012)