Infrared imaging using arrays of SiO2 micromechanical detectors
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Authors
Datskos, P.G.
Lavrik, N.V.
Hunter, S.R.
Rajic, S.
Grbovic, D.
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2012-10
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2012-10
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Abstract
In this Letter, we describe the fabrication of an array of bimaterial detectors for infrared (IR) imaging that utilize SiO2
as a structural material. All the substrate material underneath the active area of each detector element was removed.
Each detector element incorporates an optical resonant cavity layer in the IR-absorbing region of the sensing
element. The simplified microfabrication process requires only four photolithographic steps with no wet etching
or sacrificial layers...
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Optics Letters, Volume 37, No. 19, pp. 3966-3968 (October 2012)
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Department of Physics
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This publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.