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dc.contributor.authorDatskos, P.G.
dc.contributor.authorLavrik, N.V.
dc.contributor.authorHunter, S.R.
dc.contributor.authorRajic, S.
dc.contributor.authorGrbovic, D.
dc.date2012-10
dc.date.accessioned2014-12-10T19:07:56Z
dc.date.available2014-12-10T19:07:56Z
dc.date.issued2012-10
dc.identifier.urihttp://hdl.handle.net/10945/44115
dc.descriptionOptics Letters, Volume 37, No. 19, pp. 3966-3968 (October 2012)en_US
dc.description.abstractIn this Letter, we describe the fabrication of an array of bimaterial detectors for infrared (IR) imaging that utilize SiO2 as a structural material. All the substrate material underneath the active area of each detector element was removed. Each detector element incorporates an optical resonant cavity layer in the IR-absorbing region of the sensing element. The simplified microfabrication process requires only four photolithographic steps with no wet etching or sacrificial layers...en_US
dc.rightsThis publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.en_US
dc.titleInfrared imaging using arrays of SiO2 micromechanical detectorsen_US
dc.contributor.departmentDepartment of Physics


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