Microelectromechanical systems bimaterial terahertz sensor with integrated metamaterial absorber

Abstract

This Letter describes the fabrication of a microelectromechanical systems (MEMS) bimaterial terahertz (THz) sensor operating at 3.8 THz. The incident THz radiation is absorbed by a metamaterial structure integrated with the bimaterial. The absorber was designed with a resonant frequency matching the quantum cascade laser illumination source while simultaneously providing structural support, desired thermomechanical properties and optical readout access. Measurement showed that the fabricated absorber has nearly 90% absorption at 3.8 THz...