Design and simulation of a terahertz sensor using finite element modeling.
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This thesis presents the theoretical modeling of a terahertz (THz) sensor based on a flexible bi-material cantilever that performs thermal deformation under THz illumination. This thermal deformation was induced by the large mismatch thermal expansion coefficient of two materials. As THz radiation illuminated on the absorber plate, the temperature of the structure increased, causing the cantilever to deflect. The magnitude of the deflection can be measured electronically or optically, which gives a measurement of the input THz signal. The bi-material structure in this thesis is composed of a silicon dioxide cantilever beam, with regions coated with aluminum. The effect of thickness of two layers on the bending, response time, signal-to-noise ratio will be discussed. Maximum bending angle can be found in the results from the example of silicon dioxide with thickness layer from 700nm to 1400nm. The imbalanced stress due to fabrication process was taken into account to compare with simulation results to provide a better assumption on thickness selection.
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