Characterization of MEMS a directional microphone with solid and perforated wings
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This goal of this research is to characterize two micro electro mechanical system (MEMS) based directional sound sensors with solid and perforated wings. The design of the sensors was based on the structure of Ormia ochracea fly's hearing system that has highly directional hearing through mechanical coupling of the eardrums. The sensors are made of 10 micron thick single crystal silicon layer with dimensions 1 x 2 mm2. The sensors were fabricated using SOIMUMPs process available through MEMSCAP foundry service. The characteristics of the two sensors were simulated COMSOL finite element software and responses to incident sound at different angles were measured using a laser vibrometer. Both sensors showed good sound coupling and measured and simulated frequency responses are in good agreement. The sensor with perforated wings was found to have faster response compared with that of the solid wings primarily due to lower mass and higher damping. The measurements showed good sensitivity to the direction of sound as predicted from the modeling.
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