Dependence of atom ejection on electronic energy loss

Abstract

This paper extends previous theoretical models to emphasize the influence of electronic energy losses upon the ejection of atoms by bombarding ions. This sensitivity of the sputtering yield to inelastic energy losses was first observed in computer simulations of sputtering. The theoretical analysis supports the simulation-derived conclusion that the total yield is much more sensitive to electronic energy losses by the atoms than to electronic energy losses of the bombarding ions, even when the ion is much lighter than the target atoms.