High-yield sputtering events for Ar+-ion bombardment of Cu in the energy range 1-20 keV
Harrison, D.E. Jr.
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A comparison of sputtering statistics for high- and low-index planes for Cu subjected to Ar+-ion bombardment is presented and some high-yield events are analyzed in detail. IT is shown that a significant contribution to the average sputtering yield at 20 keV comes from a small number of ion trajectories which sputter a large number of atoms and that the damage produced by such impacts can be spread laterally for distances of the order of a hundred Angstroms or more.