keV particle bombardment of semiconductors: a molecular-dynamics simulation
Harrison, Don E., Jr.
Garrison, Barbara J.
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Molecular-dynamics simulations have been performed for the keV particle bombardment of Si and Si using a many-body potential developed by Tersoff. Energy and angle distributions are presented along with an analysis of the important ejection mechanisms. We have developed a computer logic that only integrates the equations of motions of the atoms that are struck, thus decreasing the computer time by a factor of 3 from a complete molecular-dynamics simulation.
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