Modeling of a micro-electronic-mechanical systems (MEMS) deformable mirror for simulation and characterization
Mueller, Mark C.
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Development of a model that can simulate the wavefront-altering effects of a micro-electro-mechanical system (MEMS) mirror has many potential research benefits. Without the need to purchase costly lab equipment and/or wait for mirror fabrication, the use of model simulation would allow users to optimize various parameters of a device before fabrication. Research focused on developing models for two of the most common types of MEMS mirrors: segmented and continuous face sheet devices. Models for these devices were first constructed in MATLAB and then experimentally verified in order to characterize and compare the differences in behavior between model and measured results. The models developed displayed similar results when compared to interferometric readings taken from an actual MEMS mirror. The models were able to reduce the wavefront error of a notional distorted wave. The corrected wavefront of the notional wave compared well with experimental data collected indicating that the models were good representations compared to actual devices of their specific type.
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