A three tier cooperative control architecture for multi-step semiconductor manufacturing proces
MetadataShow full item record
In this paper, cooperative control is investigated and applied to chained processes with multiple steps and multiple tools in semiconductor manufacturing. A cooperative control architecture is proposed to optimize product quality, to improve yield, to achieve best tool performance, and to minimize throughput time. The architecture consists of three tiers: the top tier for target optimization and overall product performance, the middle tier for tool selection based on tool performance, throughput time and tool availability, and the bottom tier for tool level run-to-run control. Large data sets are collected from four individual process steps in a fabrication facility of a leading semiconductor manufacturer and the data sets are processed and lined up for the study of cooperative control. Monte Carlo simulations are carried out based on the real data to demonstrate a significant improvement for the end-of-line product quality
The article of record as published may be found at http://dx.doi.org/10.1016/j.jprocont.2008.04.003
RightsThis publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.
Showing items related by title, author, creator and subject.
Acquisition, Tracking, Pointing, and Line-of-Sight Control Laboratory Experiments for a Space-Based Bifocal Relay Mirror Spencer, M.; Agrawal, B.N.; Romano, M.; Brunson, R.; Dillow, D.; Restaino, S. (2002);Space based bifocal relay mirrors are potentially an enabling/enhancing piece of any architecture making use of longrange laser propagation. Inherent in the bifocal concept is dual line of sight control. This is especially ...
Exploring Network-Centric Information Architectures for Unmanned Systems Control and Data Dissemination Clement, Michael R.; Bourakov, Eugene; Jones, Kevin D.; Dobrokhodov, Vladimir (2009);The exploration and development of an information architecture for networked unmanned systems is described. The unmanned systems discussed utilize standard components for guidance and navigation, coupled with additional ...
Yale, G.; Agrawal, B.N. (1994);This paper concerns the cooperative control of multiple manipulators attached to the same base as they reposition a common payload. The theory is easily applied to inertially based problems as well as space based free-floating ...