Fabrication of Bi-material MEMS detector arrays for THz imaging
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Recently, there has been a significant interest in Terahertz (THz) technology, primarily for its potential applications in detection of concealed objects as well as in medical imaging for non-invasive diagnostics. This region of the spectrum has not been fully utilized due to lack of compact and efficient THz sources and detectors. However, there are several reports recently on real-time THz imaging using uncooled microbolometer camera and quantum cascade laser (QCL) operating as a THz illuminator. The cameras used in these studies are optimized for infrared wavelengths and do not provide optimal sensitivity in the THz spectral range. The fabrication of microbolometer focal plane arrays (FPAs) is relatively complex due to the required monolithic integration of readout electronics with the MEMS pixels. The recent developments in bi-material based infrared FPAs, utilizing optical readout, substantially simplifies the FPA fabrication process by decoupling readout and sensing. In this paper, design and fabrication of a bi-material based FPAs, optimized for the THz wavelengths, as well as design and integration of the readout optical system for real-time imaging will be described.
The article of record as published may be found at http://dx.doi.org/10.1117/12.818317
RightsThis publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.
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Alves, Fabio (2014-06-03);There has been a continued interest in the terahertz (THz) imaging due to penetration through non-metallic objects and non-ionizing properties. Real-time imaging in this spectral range has been demonstrated using infrared ...
Fabio Alves; Grbovic, Dragoslav; Kearney, Brian; Karunasiri, Gamani (SPIE, 2013-03);We report on the fabrication of a microelectromechanical systems (MEMS) based bi-material terahertz (THz) detector integrated with a metamaterial structure to provide high absorption at 3.8 THz. The absorbing element of ...
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