Reduced residual stress curvature and branched comb fingers increase sensitivity of MEMS acoustic sensor
Downey, Richard H.
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We present an enhanced in-plane capacitive readout for sensing out-of-plane displacement in a MEMS acoustic sensor. The sensor is fabricated in a multi-user silicon-on-insulator process, using a thicker device layer to reduce misalignment between moving and fixed comb fingers. This misalignment is found to reduce the sensitivity and render the response nonlinear. In addition, incorporation of a branched comb design doubles the readout capacitor surface area for a given sensor size, to further increase the sensitivity. These two modifications restore linearity to the readout and increase its sensitivity to displacement by an order of magnitude.
The article of record as published may be found at http://dx.doi.org/
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