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dc.contributor.advisorKarunasiri, Gamani
dc.contributor.advisorAlves, Fabio D.
dc.contributor.authorPimental, Leroy E.
dc.date.accessioned2018-10-26T19:22:11Z
dc.date.available2018-10-26T19:22:11Z
dc.date.issued2018-09
dc.identifier.urihttp://hdl.handle.net/10945/60448
dc.descriptionApproved for public release. distribution is unlimiteden_US
dc.description.abstractTerahertz (THz) technology has gained momentum in recent years owing to special properties of THz waves being non-ionizing and at the same time being able to penetrate through non-metallic and non-polar materials. Nearly perfect THz absorption, optimized to particular THz quantum cascade laser (QCL) illumination sources, was achieved using metal-dielectric metasurfaces. The metasurfaces are composed of ultra-thin films of silicon oxide and aluminum, deposited on silicon substrates, and were fabricated using standard MEMS processes. The metasurface absorbers were structurally integrated onto an array of thermally insulated free-standing MEMS membranes that work as heat accumulators. The temperature of array is probed directly by a commercial thermal camera, translating the THz scene to infrared. The main characteristics such as spectral response, thermal time constant and sensitivity are controlled by the geometry and tuned by design according to the application demands. The results indicate great potential of using these THz sensors in real-time imaging applications. This thesis focuses on the development of the broadband IR emitter that will be probed by the IR camera. Several metamaterial broadband IR emitter geometries were evaluated and compared using finite element simulations.en_US
dc.description.urihttp://archive.org/details/metasurfacebased1094560448
dc.publisherMonterey, CA; Naval Postgraduate Schoolen_US
dc.rightsThis publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.en_US
dc.titleMETASURFACE-BASED MEMS THZ-TO-IR FOCAL PLANE ARRAYen_US
dc.typeThesisen_US
dc.contributor.departmentPhysics (PH)
dc.subject.authorterahertzen_US
dc.subject.authorspaceen_US
dc.subject.authorQCLen_US
dc.subject.authormetamaterialen_US
dc.subject.authorMEMSen_US
dc.subject.authorinfrareden_US
dc.description.recognitionOutstanding Thesisen_US
dc.description.serviceLieutenant, United States Navyen_US
etd.thesisdegree.nameMaster of Science in Applied Physicsen_US
etd.thesisdegree.levelMastersen_US
etd.thesisdegree.disciplineApplied Physicsen_US
etd.thesisdegree.grantorNaval Postgraduate Schoolen_US
dc.identifier.thesisid31848


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