Characterization of a micromachined vertically deformable varying-pitch grating for a spectrometer
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A new type of micromachined vertically deformable varying-pitch grating is designed and fabricated. Its characterization and its feasibility as a spectrometer are presented. The deformable grating shows a 0.7 µm working range and 3.6 kHz bandwidth. Its characterization and its feasibility as a spectrometer are presented. The varying-pitch grating has the ability to detect an individual wavelength with a single detector by physical scanning. Its deformable capability can increase intensity and resolution at a specific wavelength. Those two capabilities are experimentally demonstrated.
The article of record as published may be found at http://dx.doi.org/10.1088/0960-1317/22/1/015001
RightsThis publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.
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