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dc.contributor.authorKim, B.
dc.contributor.authorPhamduy, P.
dc.contributor.authorSinibaldi, J.
dc.contributor.authorKarunasiri, G.
dc.dateDecember 8, 2011
dc.date.accessioned2018-11-30T17:09:48Z
dc.date.available2018-11-30T17:09:48Z
dc.date.issued2011-12-08
dc.identifier.citationKim, B., et al. "Characterization of a micromachined vertically deformable varying-pitch grating for a spectrometer." Journal of Micromechanics and Microengineering 22.1 (2011): 015001.en_US
dc.identifier.urihttp://hdl.handle.net/10945/60723
dc.descriptionThe article of record as published may be found at http://dx.doi.org/10.1088/0960-1317/22/1/015001en_US
dc.description.abstractA new type of micromachined vertically deformable varying-pitch grating is designed and fabricated. Its characterization and its feasibility as a spectrometer are presented. The deformable grating shows a 0.7 µm working range and 3.6 kHz bandwidth. Its characterization and its feasibility as a spectrometer are presented. The varying-pitch grating has the ability to detect an individual wavelength with a single detector by physical scanning. Its deformable capability can increase intensity and resolution at a specific wavelength. Those two capabilities are experimentally demonstrated.en_US
dc.format.extent12 p.en_US
dc.publisherIOP Publishingen_US
dc.rightsThis publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.en_US
dc.titleCharacterization of a micromachined vertically deformable varying-pitch grating for a spectrometeren_US
dc.typeArticleen_US
dc.contributor.corporateNaval Postgraduate School (U.S.)en_US
dc.contributor.departmentPhysicsen_US


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