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Surface Modification of Synthetic Diamond for Producing Adherent Thick and Thin Film Etallizations for Electronic Packaging

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Author
Dutta, Indranath
Menon, Sarath K.
Date
1998-12-29
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Abstract
An article and a method of making surface modified synthetic diamond substrates at temperatures below 5000 C. for electronic packaging applications are described. The article consists of a synthetic diamond substrate, the surface of which has been modified by providing an adherent thin coating of a ceramic (alumina) material so as to enable metallization of synthetic diamond by current industrial methods. The method of surface modification comprises deposition of a thin transition metal layer on the synthetic diamond substrate prior to low temperature reactive vapor deposition of aluminum followed by annealing in an oxygen atmosphere.
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Patent
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This publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.
URI
http://hdl.handle.net/10945/7229
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