Quantitative energy dispersive x-ray spectrometry using an Emispec Vision system

Abstract

The purpose of this work was to investigate the use of an Emispec Vision system to analyze energy dispersive x-ray spectra (EDS) obtained with the Topcon 002B transmission electron microscope (TEM) in the Materials Science Laboratory at the Naval Postgraduate School. A series of tests performed with a standard NiO sample revealed that the TEM column and EDS detector were operating in a satisfactory fashion. NiO spectra acquired with different sample tilt- angles were used to test the Emispec software. An improved setup configuration, in which accurate quantification is obtained with the sample at zero tilt-angle, was developed. Quantification tests performed with TiO2, Cu-Al2O3 and alumina- YAG (with 2.5% TiO2) samples confirmed the accuracy of the new software setup. Line profiles across the alumina-YAG interfaces were also recorded to verify the performance of the Emispec system for spectrum profile acquisition and to investigate the Ti distribution at the interface of the alumina-YAG heat-treated sample