A hot-stage Atomic Force Microscope for the measurement of plastic deformation in metallic thin films during thermal cycling
Shultz, Thomas E.
MetadataShow full item record
An Atomic Force Microscope is equipped with a hot-stage and a vacuum system in order to enable in-situ studies of plastic deformation and interfacial sliding of thin metallic films on Si substrates during thermal cycling. The apparatus can reach sample temperatures of lOO deg C while maintaining optimum resolution. The system will allow future in-situ thermal cycling experiments on microelectronic devices in a protected environment to provide insight into the role of plastic deformation in metallic thin films on the stability of future generations of device structures. The details of the design, along with the performance limitations of the system are discussed. Preliminary results demonstrating the performance of the system at an elevated temperature are presented. Limited post-situ results from direct measurement of the plastic deformation of thin Cu films on Si substrates induced by thermal cycling are also presented, primarily with the objective of establishing the need for detailed in-situ studies. While artifacts such as permanent dimensional changes of the film are observed post-situ, a detailed mechanistic understanding of the interaction between the temperature-dependent stress state of the film and the resultant inelastic deformation within the film and at the interface can only be obtained through in-situ experiments.
RightsThis publication is a work of the U.S. Government as defined in Title 17, United States Code, Section 101. Copyright protection is not available for this work in the United States.
Showing items related by title, author, creator and subject.
Role of interfacial and matrix creep during thermal cycling of continuous fiber reinforced metal-matrix composites Dutta, I. (Published by Elsevier Science Ltd (Pergamon) on behalf of Acta Metallurgica Inc., 1999-10-21);A uni-dimensional micro-mechanical model for thermal cycling of continuous fiber reinforced metal-matrix composites is developed. The model treats the fiber and matrix as thermo-elastic and thermo-elasto-plastic-creeping ...
A model for deformation of continuous fiber composites under isothermal creep and thermal cycling conditions Esmele, Myles (Monterey, California. Naval Postgraduate School, 1997-12);A one-dimensional analytical model for axial deformation of continuous fiber reinforced metal-matrix composites under both thermal cycling and isothermal creep, with or without externally applied stresses, has been developed. ...
Wiest, Anthony D. (Monterey, California. Naval Postgraduate School, 1992-09);The thermal strain response of as-cast samples of 40% PI 00 graphite fiber reinforced 6061 Al composites in the unidirectionally reinforced and the [0/90] cross-plied configuration was studied. Thermal strain hysteresis ...